Getter for MEMS "PageWafer / PageLid"
Improving long-term stability of devices! Thin film getter deposition process designed for MEMS vacuum packaging.
Getter films for MEMS are products specifically developed for MEMS packaging. We offer products for both wafer-level packages (PageWafer) and discrete packages (PageLid, PageSheet), all of which maintain the high vacuum levels required for packaging and contribute to the long-term reliability and stability of the devices. Currently, getters for MEMS are commonly used in various hermetically sealed MEMS products for military and defense, automotive, industrial, and consumer applications, and are widely accepted as a technology for maintaining vacuum within packages. 【Features】 - Compatible with high vacuum packages - Ensures long-term reliability - High adsorption performance for active gases - Activation temperature adaptable to almost all sealing processes - Supports two types of patterning methods (metal mask/lift-off) particle-free
- Company：サエス・ゲッターズ・エス・ピー・エー 日本支店
- Price：Other
